Shibata J, Murayama N. Separation and Recovery of SiC Particles Discharged from Silicon Wafer Production Process. J. Appl. Sol. Chem. Model. [Internet]. 2014 Mar. 14 [cited 2024 May 6];3(1):32-8. Available from: https://www.lifescienceglobal.com/pms/index.php/JASCM/article/view/1732