Diamond Deposition on Graphite in Hydrogen Microwave Plasma

Authors

  • Jiaqi Zhu Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin, 150080, P. R. China
  • Kaili Yao Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin, 150080, P. R. China
  • Bing Dai Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin, 150080, P. R. China
  • Victor Ralchenko Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin, 150080, P. R. China
  • Guoyang Shu Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin, 150080, P. R. China
  • Jiwen Zhao Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin, 150080, P. R. China
  • Kang Liu Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin, 150080, P. R. China
  • Lei Yang Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin, 150080, P. R. China
  • Andrey Bolshakov Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin, 150080, P. R. China
  • Jiecai Han Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin, 150080, P. R. China

DOI:

https://doi.org/10.6000/2369-3355.2018.05.01.2

Keywords:

Microwave plasma, diamond deposition, hydrogen plasma, graphite, etching.

Abstract

Hydrogen plasma etching of graphite generates radicals that can be used for diamond synthesis by chemical vapor deposition (CVD). We studied the etching of polycrystalline graphite by a hydrogen microwave plasma, growth of diamond particles of the non-seeded graphite substrates, and characterized the diamond morphology, grain size distribution, growth rate, and phase purity. The graphite substrates served simultaneously as a carbon source, this being the specific feature of the process. A disorder of the graphite surface structure reduces as the result of the etching as revealed with Raman spectroscopy. The diamond growth rate of 3 – 5 µm/h was achieved, the quality of the produced diamond grains improving with growth time due to inherently nonstationary graphite etching process

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Published

2018-08-16

How to Cite

Zhu, J., Yao, K., Dai, B., Ralchenko, V., Shu, G., Zhao, J., Liu, K., Yang, L., Bolshakov, A., & Han, J. (2018). Diamond Deposition on Graphite in Hydrogen Microwave Plasma. Journal of Coating Science and Technology, 5(1), 12–18. https://doi.org/10.6000/2369-3355.2018.05.01.2

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Vol. 5 No. 1 (2018)

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