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Reactive DC Magnetron Sputtering-Induced the Formation of Amorphous CuN Films Embedded Nanocrystalline WC Phase
Pages 23-28
Yue Lin and Shihong Zhang

DOI: http://dx.doi.org/10.6000/2369-3355.2016.03.01.3

Published: 24 May 2016


Abstract: A novel amorphous CuN/nanocrystal WC (nc-WC/a-CuN) film synthesized by reactive dc magnetron sputtering is reported in this paper. The nc-WC/a-CuN42 at.% film which is composed of many WC dendrite crystals of 5~10 nm with (001) orientation embedded in amorphous CuN possesses ~55 GPa hardness. The high-temperature wear analysis shows that this novel film possesses the comparable excellent friction performance with DLC film which is attributed to self-lubricant function of a-CuN; simultaneously the film was still maintaining the higher hardness at elevated temperature.

Keywords: Nanocomposite film; Reactive magnetron sputtering; CuN; WC; High-temperature wear behavior.


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